Field localization and enhanced Second-Harmonic Generation in silicon-based microcavities

High-quality amorphous Silicon Nitride (a-Si(1-X)N(X):H) Fabry-Perot microcavities can show resonant surface Second Harmonic Generation (SHG) effect. We consider two different layouts of planar microcavities with almost identical linear reflectance and show how the structure geometry can strongly affect SHG yield. In particular, a difference of more than one order of magnitude in the SHG intensity is observed when the fundamental beam is tuned at the cavity resonance frequency. We explain this finding on the basis of a theoretical model taking into account the spatial distribution of the electric fields of the pump and harmonic frequencies inside the structure. A satisfactory matching of experimental data with the theoretical model is obtained by considering the source of second-order nonlinearity as limited to surface contributions.