Aryl sulfonates as initiators for EUV lithography. Applications on epoxy-based hybrid materials
Academic Article
Publication Date:
2018
Iris type:
1.1 Articolo in rivista
Keywords:
Aryl sulfonates, EUV lithography, photoinitiators
List of contributors:
Torti, E.; Protti, S.; Bollanti, S.; Flora, F.; Torre, A.; Brusatin, G.; Gerardino, A.; Businaro, L.; Fagnoni, M.; Della Giustina, G.; Mezi, L.
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