Tri-layer soft UV imprint lithography and fabrication of high density pillars

Academic Article

Publication Date:

2006

Iris type:

1.1 Articolo in rivista

Keywords:

Nanotechnology; nanofabrication; soft lithography

List of contributors:

Shi, J.; Belotti, Michele; Peroz, C.; Peyrade, D.; Salari, J.; Huang, W. h.; Chen, Y.

Handle:

https://iris.unipv.it/handle/11571/28156

Published in:

MICROELECTRONIC ENGINEERING

Journal