Reflection properties of hybrid quarter-wavelength silicon microstructures

Academic Article

Publication Date:

2007

Iris type:

1.1 Articolo in rivista

Keywords:

MEMS; Micromachining; Optical measurements

List of contributors:

G., Barillaro; ANNOVAZZI LODI, Valerio; Benedetti, Mauro; Merlo, SABINA GIOVANNA

Authors of the University:

ANNOVAZZI LODI VALERIO

MERLO SABINA GIOVANNA

Handle:

https://iris.unipv.it/handle/11571/113448

Published in:

APPLIED PHYSICS LETTERS

Journal