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Optical study of high dose implanted, laser annealed silicon
Academic Article
Publication Date:
1987
Iris type:
1.1 Articolo in rivista
List of contributors:
A., Borghesi; Guizzetti, Giorgio; L., Nosenzo; A., Stella; S. U., Campisano; E., Rimini
Handle:
https://iris.unipv.it/handle/11571/449635
Published in:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Journal
