Fabrication and optical measurements of silicon on insulator photonic nanostructures

We report on results of the fabrication and optical measurements of silicon on insulator (SOI) nanostructures
designed for photonic applications. Patterning has been done by electron beam lithography and reactive ion
etching with an SF and CHF gas mixture. Both one dimensional (1D) and two dimensional (2D) photonic 6 3
lattices were studied by measuring dispersion curves above the light cone. Lateral Fabry-Perot resonators were
also fabricated in a waveguide geometry, showing strong dependence of the transmission intensity as a function
of the silicon filling factor and the number of air gaps in the Bragg-like mirrors.