A 2D non-linear second-order differential model for electrostatic circular membrane MEMS devices: A result of existence and uniqueness
Articolo
Data di Pubblicazione:
2019
Abstract:
In the framework of 2D circular membrane Micro-Electric-Mechanical-Systems (MEMS), a new non-linear second-order differential model with singularity in the steady-state case is presented in this paper. In particular, starting from the fact that the electric field magnitude is locally proportional to the curvature of the membrane, the problem is formalized in terms of the mean curvature. Then, a result of the existence of at least one solution is achieved. Finally, two different approaches prove that the uniqueness of the solutions is not ensured.
Tipologia CRIS:
1.1 Articolo in rivista
Keywords:
Boundary non-linear second-order differential problems; Circular membrane MEMS devices; Electrostatic actuator; Mean curvature; Singularities
Elenco autori:
Di Barba, P.; Fattorusso, L.; Versaci, M.
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