Infrared study of oxygen precipitates in Czochralski grown silicon

Oxygen precipitation in the bulk of silicon wafers was investigated by using micro‐Fourier transform infrared spectroscopy. It was found that even at 1100 °C annealing (in single step) SiO2 precipitates are formed in platelet shape, in the bulk, giving rise to characteristic absorption peak in the infrared spectrum at 1230 cm−1. Complete mapping of wafer cross section demonstrated that these precipitates are not distributed homogeneously but are agglomerated in irregularly shaped clusters and are easily detectable up to distance of about 100 μm from the back surface and from the epi‐substrate interface