This course represents a general introduction to microelectromechanical systems.
Course Prerequisites
Principles of mechanics. Electronic circuits. Electromagnetic waves.
Teaching Methods
Lectures (hours/year in lecture theatre): 41 Practical class (hours/year in lecture theatre): 13 Practicals / Workshops (hours/year in lecture theatre): 0 Classroom lectures are given with computer presentations.
Assessment Methods
The final exam consists in a close-book written test. The highest grade is 30/30 cum laude. The threshold grade for passing the exam is 18/30.
Texts
Copies of transparencies and supplementary material available on the course web-site on Kiro platform.
Contents
The principle of operation of linear accelerometer, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.
